market_semiconductorWith our close proximity to Silicon Valley and the constant demand for quick-turn and reliable brazed assemblies, Altair has always provided brazing services to many of the Tier 1 suppliers for the capital equipment OEMs in Silicon Valley. These include Lam Research, AMAT, Novellus Systems, and KLA-Tencor.

We routinely braze SST and Titanium assemblies for the PVD semiconductor market. In the mid 1990s we introduced specially designed vacuum aluminum brazing furnaces for the CVD market. These furnaces utilize special ribbon-type heating elements and several independently controlled hot-zones for improved temperature uniformity. Unlike dip-brazing of aluminum, vacuum brazing is salt and flux free, producing an ultra-clean product that won’t contaminate or “leach out” into your vacuum chamber over time. The vacuum brazing of aluminum leaves a smooth almost undetectable braze joint, which is hermetic, strong and also more aesthetically pleasing than the large non-uniform weld bead seen on TIG welded assemblies. For assemblies using heating elements, we have a proprietary technique that virtually achieves 360 degrees of bonding around the circumference of the heating element used on pedestals and tables. Unlike welding or standard brazing methods, this ~360° bond allows for better temperature uniformity and/or high power density due to the much improved thermal conductive path that it provides.

market_semiconductor1Altair Technologies has always enjoyed excellent customer loyalty on semiconductor products and with very good reason. The first pass yields on SST and 6061 Aluminum brazed assemblies typically run >99%

In addition to providing brazing services for the many machine shops in our area, we provide high level turnkey assemblies:

logo_motto Heaters or Heater Tables
logo_motto Coolers
logo_motto Electro-Static Chucks
logo_motto Showerheads
logo_motto Water Boxes
logo_motto Gas Boxes
logo_motto Cavity Adapters
logo_motto Pedestals
logo_motto UHV Feed-Through

pdf_16x16  Altair Info Sheet_SemiConductor